High Sensitivity Surface Micromachined Absolute Pressure Sensor
نویسندگان
چکیده
منابع مشابه
Bulk Micromachined Pressure Sensor
Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2016
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2016.11.261